Non-contact direct-drive system ensures ultraprecision motion with high dynamics and reliability
Extra-large, high-efficiency linear motor minimizes heat generation
Ironless moving coil has no cogging for ultra smooth velocity control
Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration
High precision glass scale encoder provides accurate position feedback with 50 nm repeatability
Sub-nm resolution with low interpolation error for outstanding speed stability and motion sensitivity
No moving cables inside the stage, reduced particle generation and improved reliability
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